Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns

XR Jiang, JE Barth, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)3747-3752
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number6
    Publication statusPublished - 1996

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