@article{288944db7686475e934da19b4e5fcf1a,

title = "Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns",

author = "XR Jiang and JE Barth and P Kruit",

year = "1996",

language = "Undefined/Unknown",

volume = "B14",

pages = "3747--3752",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}