Combined focused electron beam-induced deposition and etching for the patterning of dense lines without interconnecting material

Sangeetha Hari, P. H.F. Trompenaars, J. J.L. Mulders, Pieter Kruit, C. W. Hagen*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
66 Downloads (Pure)

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