Combining UV-and Electron beam lithography for superconducting bandpass filters in mm/sub-mm astronomy

D.J. Thoen, V. Murugesan, K. Karatsu, A. Pascual Laguna, A. Endo, J.J.A. Baselmans

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Physics & Astronomy