Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

Christian De Vita; Charalambos Klitis; Nina Codreanu; Giorgio Ferrari; Marc Sorel; Andrea Melloni; Francesco Morichetti

doi:10.1109/GFP51802.2021.9673949

Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

Christian De Vita, Charalambos Klitis, Nina Codreanu, Giorgio Ferrari, Marc Sorel, Andrea Melloni, Francesco Morichetti

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

Original language	English
Title of host publication	2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	978-1-6654-2224-6
DOIs	https://doi.org/10.1109/GFP51802.2021.9673949
Publication status	Published - 2022
Event	17th IEEE International Conference on Group IV Photonics, GFP 2021 - Virtual, Online, Spain Duration: 7 Dec 2021 → 10 Dec 2021

Publication series

Name	IEEE International Conference on Group IV Photonics GFP
Volume	2021-December
ISSN (Print)	1949-2081

Conference

Conference	17th IEEE International Conference on Group IV Photonics, GFP 2021
Country/Territory	Spain
City	Virtual, Online
Period	7/12/21 → 10/12/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

amorphous silicon
integrated detectors
optical waveguides
photonic integrated circuits
visible light

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10.1109/GFP51802.2021.9673949

Compact_amorphous-silicon_visible-light_monitor_integrated_in_silicon_nitride_waveguidesFinal published version, 1.11 MB

Cite this

De Vita, C., Klitis, C., Codreanu, N., Ferrari, G., Sorel, M., Melloni, A., & Morichetti, F. (2022). Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides. In 2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings (IEEE International Conference on Group IV Photonics GFP; Vol. 2021-December). IEEE . https://doi.org/10.1109/GFP51802.2021.9673949

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title = "Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides",

abstract = "This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.",

keywords = "amorphous silicon, integrated detectors, optical waveguides, photonic integrated circuits, visible light",

author = "{De Vita}, Christian and Charalambos Klitis and Nina Codreanu and Giorgio Ferrari and Marc Sorel and Andrea Melloni and Francesco Morichetti",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 17th IEEE International Conference on Group IV Photonics, GFP 2021 ; Conference date: 07-12-2021 Through 10-12-2021",

year = "2022",

doi = "10.1109/GFP51802.2021.9673949",

language = "English",

series = "IEEE International Conference on Group IV Photonics GFP",

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booktitle = "2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings",

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De Vita, C, Klitis, C, Codreanu, N, Ferrari, G, Sorel, M, Melloni, A & Morichetti, F 2022, Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides. in 2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings. IEEE International Conference on Group IV Photonics GFP, vol. 2021-December, IEEE , 17th IEEE International Conference on Group IV Photonics, GFP 2021, Virtual, Online, Spain, 7/12/21. https://doi.org/10.1109/GFP51802.2021.9673949

Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides. / De Vita, Christian; Klitis, Charalambos; Codreanu, Nina et al.

2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings. IEEE , 2022. (IEEE International Conference on Group IV Photonics GFP; Vol. 2021-December).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

AU - De Vita, Christian

AU - Klitis, Charalambos

AU - Codreanu, Nina

AU - Ferrari, Giorgio

AU - Sorel, Marc

AU - Melloni, Andrea

AU - Morichetti, Francesco

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2022

Y1 - 2022

N2 - This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

AB - This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

KW - amorphous silicon

KW - integrated detectors

KW - optical waveguides

KW - photonic integrated circuits

KW - visible light

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DO - 10.1109/GFP51802.2021.9673949

M3 - Conference contribution

AN - SCOPUS:85124684793

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Y2 - 7 December 2021 through 10 December 2021

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Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

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