Abstract
This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.
Original language | English |
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Title of host publication | 2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings |
Publisher | IEEE |
Number of pages | 2 |
ISBN (Electronic) | 978-1-6654-2224-6 |
DOIs | |
Publication status | Published - 2022 |
Event | 17th IEEE International Conference on Group IV Photonics, GFP 2021 - Virtual, Online, Spain Duration: 7 Dec 2021 → 10 Dec 2021 |
Publication series
Name | IEEE International Conference on Group IV Photonics GFP |
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Volume | 2021-December |
ISSN (Print) | 1949-2081 |
Conference
Conference | 17th IEEE International Conference on Group IV Photonics, GFP 2021 |
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Country/Territory | Spain |
City | Virtual, Online |
Period | 7/12/21 → 10/12/21 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- amorphous silicon
- integrated detectors
- optical waveguides
- photonic integrated circuits
- visible light