Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

Christian De Vita, Charalambos Klitis, Nina Codreanu, Giorgio Ferrari, Marc Sorel, Andrea Melloni, Francesco Morichetti

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

Original languageEnglish
Title of host publication2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings
Number of pages2
ISBN (Electronic)978-1-6654-2224-6
Publication statusPublished - 2022
Event17th IEEE International Conference on Group IV Photonics, GFP 2021 - Virtual, Online, Spain
Duration: 7 Dec 202110 Dec 2021

Publication series

NameIEEE International Conference on Group IV Photonics GFP
ISSN (Print)1949-2081


Conference17th IEEE International Conference on Group IV Photonics, GFP 2021
CityVirtual, Online

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


  • amorphous silicon
  • integrated detectors
  • optical waveguides
  • photonic integrated circuits
  • visible light

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