This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 μm), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.
|Title of host publication||2021 IEEE 17th International Conference on Group IV Photonics, GFP 2021 - Proceedings|
|Number of pages||2|
|Publication status||Published - 2022|
|Event||17th IEEE International Conference on Group IV Photonics, GFP 2021 - Virtual, Online, Spain|
Duration: 7 Dec 2021 → 10 Dec 2021
|Name||IEEE International Conference on Group IV Photonics GFP|
|Conference||17th IEEE International Conference on Group IV Photonics, GFP 2021|
|Period||7/12/21 → 10/12/21|
Bibliographical noteGreen Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
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- amorphous silicon
- integrated detectors
- optical waveguides
- photonic integrated circuits
- visible light