Compact Thermal Diffusivity Sensors for On-Chip Thermal Management

Ugur Sonmez

Research output: ThesisDissertation (TU Delft)

67 Downloads (Pure)


Today’s systems-on-chip (SOCs) and microprocessors are complex systems that require multiple temperature sensors to monitor temperature variations in multiple spots on a single silicon die. For such thermal management applications, specialized compact and fast temperature sensors are required. This is necessary because executing an intensive process on an SoC can cause local hotspots in a short amount of time, which can compromise reliability. Such temperature sensors should also be compatible with advanced nanometer CMOS technologies, since complex SoCs and microprocessors are typically implemented in aggressively scaled CMOS processes.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Makinwa, K.A.A., Supervisor
  • Sebastiano, F., Advisor
Award date12 Mar 2020
Place of PublicationEnschede
Print ISBNs978-94-028-1971-7
Publication statusPublished - 2020


  • thermal diffusivity (TD)
  • phase domain sigma delta ADC
  • Temperature sensor
  • VCO-based sigma-delta modulator
  • smart sensors


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