Comparative Study of the Resolution of Ge-on-Si Photodetectors for 1μ m Infrared Signals

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Most of the studies on narrow-band near-infrared detection reported so far are related to the 1.3μm and 1.55μm spectral windows. There is insufficient research work done on radiation detection in the narrow band around 1 μm wavelength, which is just outside the Si (0.95μ m) and GaAs (0.85μ m) effective cut-off spectral sensitivity. This paper presents a p+n Ge-on-Si detector with a customized large active window, employing the PureGaB technology, to detect radiation in a very narrow band around 1μ m. The advantages of the proposed detector are: (1) CMOS-compatibility and micro-spectroscopic capability; (2) low dark current and high photoresponsivity, compared to similar devices reported in the literature; (3) enhanced sensitivity to weak radiation by realizing an ultra-shallow and very thin depletion region. These detectors can be good candidates for measuring the YAG laser radiation and measuring stray radiation in photolithography.

Original languageEnglish
Title of host publication1st IEEE Industrial Electronics Society Annual On-Line Conference, ONCON 2022
PublisherIEEE
Number of pages6
ISBN (Electronic)9798350398069
DOIs
Publication statusPublished - 2022
Event1st IEEE Industrial Electronics Society Annual On-Line Conference, ONCON 2022 - Kharagpur, India
Duration: 9 Dec 202211 Dec 2022

Publication series

Name1st IEEE Industrial Electronics Society Annual On-Line Conference, ONCON 2022

Conference

Conference1st IEEE Industrial Electronics Society Annual On-Line Conference, ONCON 2022
Country/TerritoryIndia
CityKharagpur
Period9/12/2211/12/22

Keywords

  • 1-μ m Infrared
  • Ge-on-Si Photodiode
  • Infrared detection
  • SiGe Junction

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