Comparison of numerical methods for transient CVD simulations

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	8859-8862
Number of pages	4
Journal	Surface and Coatings Technology
Volume	201
Publication status	Published - 2007

Keywords

@article{d3428503b6bb410cbb429ffba5fedd17,

title = "Comparison of numerical methods for transient CVD simulations",

keywords = "Wiskunde en Informatica, Techniek, technische Wiskunde en Informatica, CWTS 0.75 <= JFIS < 2.00",

author = "{van Veldhuizen}, S and C Vuik and CR Kleijn",

year = "2007",

language = "Undefined/Unknown",

volume = "201",

pages = "8859--8862",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Comparison of numerical methods for transient CVD simulations

AU - van Veldhuizen, S

AU - Vuik, C

AU - Kleijn, CR

PY - 2007

Y1 - 2007

KW - Wiskunde en Informatica

KW - Techniek

KW - technische Wiskunde en Informatica

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0257-8972

VL - 201

SP - 8859

EP - 8862

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -