Comparison of numerical methods for transient CVD simulations

S van Veldhuizen, C Vuik, CR Kleijn

Research output: Contribution to journalArticleScientific

8 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)8859-8862
Number of pages4
JournalSurface and Coatings Technology
Volume201
Publication statusPublished - 2007

Keywords

  • Wiskunde en Informatica
  • Techniek
  • technische Wiskunde en Informatica
  • CWTS 0.75 <= JFIS < 2.00

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