Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

E Connolly, GM O'Halloran, TMH Pham, PM Sarro, PJ French

Research output: Contribution to journalArticleScientificpeer-review

115 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)25-30
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
VolumeA 99
Publication statusPublished - 2002

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

Cite this