Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

E Connolly, GM O'Halloran, TMH Pham, PM Sarro, PJ French

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	25-30
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	A 99
Publication status	Published - 2002

Keywords

@article{36c0e5d5e5e941b99309cd0a9cd74adc,

title = "Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications",

keywords = "Elektrotechniek, Techniek, ZX CWTS 1.00 <= JFIS < 3.00",

author = "E Connolly and GM O'Halloran and TMH Pham and PM Sarro and PJ French",

year = "2002",

language = "Undefined/Unknown",

volume = "A 99",

pages = "25--30",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

AU - Connolly, E

AU - O'Halloran, GM

AU - Pham, TMH

AU - Sarro, PM

AU - French, PJ

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0924-4247

VL - A 99

SP - 25

EP - 30

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -