Compensation of High-Frequency Disturbances in Scanning Microscopes

P Kruit, VF van Ravesteijn, B Rieger, F Berwald, JHM van der Linden

    Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

    Original languageUndefined/Unknown
    Title of host publicationFrom Scientific Instrument to Industrial Machine Coping with Architectural Stress in Embedded Systems
    EditorsR Doornbos, S van Loo
    Place of Publications.n.
    Number of pages112
    ISBN (Print)978-94-007-4146-1
    Publication statusPublished - 2012

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