Compensation of temperature effects on the pull-in voltage of microstructures

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	351-356
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	115
Publication status	Published - 2004

Keywords

@article{9f42657210814c2c8b75591e02f46b35,

title = "Compensation of temperature effects on the pull-in voltage of microstructures",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2004",

language = "Undefined/Unknown",

volume = "115",

pages = "351--356",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Compensation of temperature effects on the pull-in voltage of microstructures

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2004

Y1 - 2004

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 0924-4247

VL - 115

SP - 351

EP - 356

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -