Compensation of the birefringence induced by spartial dispersion in 157 nm

A Serebriakov, F Bociort, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEOS Topical Meeting on Advanced Imaging Techniques
EditorsK Nowitzki
Place of PublicationDelft
PublisherEOS
Pages67-68
Number of pages2
ISBN (Print)3-00-012842-5
Publication statusPublished - 2003
EventTopical Meeting - Delft
Duration: 20 Oct 200323 Oct 2003

Publication series

Name
PublisherEOS

Conference

ConferenceTopical Meeting
Period20/10/0323/10/03

Keywords

  • conference contrib. refereed
  • Geen BTA classificatie

Cite this

Serebriakov, A., Bociort, F., & Braat, JJM. (2003). Compensation of the birefringence induced by spartial dispersion in 157 nm. In K. Nowitzki (Ed.), EOS Topical Meeting on Advanced Imaging Techniques (pp. 67-68). EOS.