Complex roughening of Si under oblique bombardment by low-energy oxygen ions.

PFA Alkemade, ZX Jiang

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1699-1705
    Number of pages7
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume19
    Issue number5
    Publication statusPublished - 2000

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this