Computational Modeling of Transport Phenomena and Detailed Chemistry in Chemical Vapor Deposition - a benchmark solution.

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Keywords

@article{26ed9497705e4b1090e5d991206ff525,

title = "Computational Modeling of Transport Phenomena and Detailed Chemistry in Chemical Vapor Deposition - a benchmark solution.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "CR Kleijn",

year = "2000",

language = "Undefined/Unknown",

volume = "365",

pages = "294--306",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "2",

}