Original language | English |
---|---|
Title of host publication | Cleanroom Technology Forum Proceedings |
Subtitle of host publication | Microcontamination 91 |
Place of Publication | San Jose, Ca, USA |
Publisher | Canon Communications, Inc. |
Pages | 23-30 |
Number of pages | 8 |
Publication status | Published - Oct 1991 |
Computer Flow Modelling
P Luscuere, Tony Lemaire*
*Corresponding author for this work
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional