| Original language | English |
|---|---|
| Title of host publication | Cleanroom Technology Forum Proceedings |
| Subtitle of host publication | Microcontamination 91 |
| Place of Publication | San Jose, Ca, USA |
| Publisher | Canon Communications, Inc. |
| Pages | 23-30 |
| Number of pages | 8 |
| Publication status | Published - Oct 1991 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver