@inproceedings{c6f671c51417429b91dd9b370bfb51fb,
title = "Consistent vibration analysis of electrostatically coupled structures: application to microsystems",
keywords = "Conf.proc. > 3 pag",
author = "V Rochus and DJ Rixen and JC Golinval",
year = "2003",
language = "Undefined/Unknown",
publisher = "International Institute of Acoustics and Vibration",
pages = "509--515",
editor = "A Nilsson and H Boden",
booktitle = "ICSV10",
note = "Tenth international congress on sound and vibration, Stockholm ; Conference date: 07-07-2003 Through 10-07-2003",
}