Contact-less thin substrate transport using viscous traction

Ron van Ostayen; Jan van Eijk; Robert Munnig Schmidt

doi:10.1109/dMEMS.2012.19

Contact-less thin substrate transport using viscous traction

Ron van Ostayen, Jan van Eijk, Robert Munnig Schmidt

Mechatronic Systems Design

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Abstract

A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.

Original language	English
Title of host publication	Proceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS
Subtitle of host publication	dMEMS 2012
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	14-21
ISBN (Print)	978-0-7695-4679-7
DOIs	https://doi.org/10.1109/dMEMS.2012.19
Publication status	Published - 2012
Event	Second Workshop on Design, Control and Software Implementation for Distributed MEMS - Besançon, France Duration: 2 Apr 2012 → 3 Apr 2012

Conference

Conference	Second Workshop on Design, Control and Software Implementation for Distributed MEMS
Abbreviated title	dMEMS 2012
Country/Territory	France
City	Besançon
Period	2/04/12 → 3/04/12

Keywords

Actuators
Geometry
Substrates
Arrays
Force
Acceleration
Traction motors

Access to Document

10.1109/dMEMS.2012.19

Cite this

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title = "Contact-less thin substrate transport using viscous traction",

abstract = "A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.",

keywords = "Actuators, Geometry, Substrates, Arrays, Force, Acceleration, Traction motors",

author = "{van Ostayen}, Ron and {van Eijk}, Jan and {Munnig Schmidt}, Robert",

year = "2012",

doi = "10.1109/dMEMS.2012.19",

language = "English",

isbn = "978-0-7695-4679-7",

pages = "14--21",

booktitle = "Proceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS",

publisher = "IEEE",

address = "United States",

note = "Second Workshop on Design, Control and Software Implementation for Distributed MEMS, dMEMS 2012 ; Conference date: 02-04-2012 Through 03-04-2012",

}

van Ostayen, R, van Eijk, J & Munnig Schmidt, R 2012, Contact-less thin substrate transport using viscous traction. in Proceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS: dMEMS 2012. IEEE, Piscataway, NJ, USA, pp. 14-21, Second Workshop on Design, Control and Software Implementation for Distributed MEMS, Besançon, France, 2/04/12. https://doi.org/10.1109/dMEMS.2012.19

Contact-less thin substrate transport using viscous traction. / van Ostayen, Ron; van Eijk, Jan; Munnig Schmidt, Robert.
Proceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS: dMEMS 2012. Piscataway, NJ, USA: IEEE, 2012. p. 14-21.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - van Eijk, Jan

AU - Munnig Schmidt, Robert

PY - 2012

Y1 - 2012

N2 - A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.

AB - A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.

KW - Actuators

KW - Geometry

KW - Substrates

KW - Arrays

KW - Force

KW - Acceleration

KW - Traction motors

U2 - 10.1109/dMEMS.2012.19

DO - 10.1109/dMEMS.2012.19

M3 - Conference contribution

SN - 978-0-7695-4679-7

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EP - 21

BT - Proceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS

PB - IEEE

CY - Piscataway, NJ, USA

T2 - Second Workshop on Design, Control and Software Implementation for Distributed MEMS

Y2 - 2 April 2012 through 3 April 2012

ER -

Contact-less thin substrate transport using viscous traction

Abstract

Conference

Keywords

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