Contact-less thin substrate transport using viscous traction

Ron van Ostayen, Jan van Eijk, Robert Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.
Original languageEnglish
Title of host publicationProceedings 2012 Second Workshop on Design, Control and Software Implementation for Distributed MEMS
Subtitle of host publicationdMEMS 2012
Place of PublicationPiscataway, NJ, USA
PublisherIEEE
Pages14-21
ISBN (Print)978-0-7695-4679-7
DOIs
Publication statusPublished - 2012
EventSecond Workshop on Design, Control and Software Implementation for Distributed MEMS - Besançon, France
Duration: 2 Apr 20123 Apr 2012

Conference

ConferenceSecond Workshop on Design, Control and Software Implementation for Distributed MEMS
Abbreviated titledMEMS 2012
CountryFrance
CityBesançon
Period2/04/123/04/12

Keywords

  • Actuators
  • Geometry
  • Substrates
  • Arrays
  • Force
  • Acceleration
  • Traction motors

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