Contactless 6 DoF planar positioning system utilizing an active air film

J Wesselingh, JW Spronck, RAJ van Ostayen, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 10th international conference of the european society for precision engineering and nanotechnology
EditorsH Spaan, P Shore
Place of PublicationDelft
PublisherEUSPEN
Pages417-420
Number of pages4
ISBN (Print)978-0-9553082-8-4
Publication statusPublished - 2010
Event10th international conference of the european society for precision engineering and nanotechnology - Delft
Duration: 31 May 20104 Jun 2010

Publication series

Name
Publishereuspen
Name
Volume1

Conference

Conference10th international conference of the european society for precision engineering and nanotechnology
Period31/05/104/06/10

Keywords

  • Conf.proc. > 3 pag

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