Continous production of nanostructured particles using spatial atomic layer deposition

JR van Ommen, DJ Kooijman, M de Niet, M Talebi, A Goulas

Research output: Contribution to journalArticleScientificpeer-review

38 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalJournal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Issue number2
Publication statusPublished - 2015

Bibliographical note

paginanummers 021513-1 t/m 021513-5

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