Continous production of nanostructured particles using spatial atomic layer deposition

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Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	33
Issue number	2
DOIs	https://doi.org/10.1116/1.4905725
Publication status	Published - 2015

paginanummers 021513-1 t/m 021513-5

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@article{dcb4e6ba640f404d997f81387d9c3f50,

title = "Continous production of nanostructured particles using spatial atomic layer deposition",

author = "\{van Ommen\}, JR and DJ Kooijman and \{de Niet\}, M and M Talebi and A Goulas",

note = "paginanummers 021513-1 t/m 021513-5",

year = "2015",

doi = "10.1116/1.4905725",

language = "English",

volume = "33",

pages = "1--5",

journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Continous production of nanostructured particles using spatial atomic layer deposition

AU - van Ommen, JR

AU - Kooijman, DJ

AU - de Niet, M

AU - Talebi, M

AU - Goulas, A

N1 - paginanummers 021513-1 t/m 021513-5

PY - 2015

Y1 - 2015

U2 - 10.1116/1.4905725

DO - 10.1116/1.4905725

M3 - Article

SN - 0734-2101

VL - 33

SP - 1

EP - 5

JO - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 2

ER -