@article{dcb4e6ba640f404d997f81387d9c3f50,
title = "Continous production of nanostructured particles using spatial atomic layer deposition",
author = "{van Ommen}, JR and DJ Kooijman and {de Niet}, M and M Talebi and A Goulas",
note = "paginanummers 021513-1 t/m 021513-5",
year = "2015",
doi = "10.1116/1.4905725",
language = "English",
volume = "33",
pages = "1--5",
journal = "Journal of Vacuum Science and Technology. Part A: International Journal Devoted to Vacuum, Surfaces, and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "2",
}