Original language | Undefined/Unknown |
---|---|
Journal | Journal of Micromechanics and Microengineering |
Volume | 8 |
Issue number | 125023 |
Publication status | Published - 2008 |
Keywords
- academic journal papers
- CWTS 0.75 <= JFIS < 2.00
R Li, Y Lamy, WFA Besling, F Roozeboom, PM Sarro
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | Undefined/Unknown |
---|---|
Journal | Journal of Micromechanics and Microengineering |
Volume | 8 |
Issue number | 125023 |
Publication status | Published - 2008 |