Control of arsenic doping during low temperature CVD epitaxy of Silicon (100)

WD van Noort, LK Nanver, JW Slotboom

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	4301-4304
Number of pages	4
Journal	Electrochemical Society. Journal
Volume	147
Issue number	11
Publication status	Published - 2000

Keywords

@article{952a2c0136f4499799ae466c9fe9d621,

title = "Control of arsenic doping during low temperature CVD epitaxy of Silicon (100)",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Noort}, WD and LK Nanver and JW Slotboom",

year = "2000",

language = "Undefined/Unknown",

volume = "147",

pages = "4301--4304",

journal = "Electrochemical Society. Journal",

issn = "0013-4651",

publisher = "Electrochemical Society, Inc.",

number = "11",

}