Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

MA Wank; I Martin; MA Blauw; RACMM van Swaaij; MCM van de Sanden

Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

MA Wank, I Martin, MA Blauw, RACMM van Swaaij, MCM van de Sanden

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Editors	s.n.
Place of Publication	Veldhoven, The Netherlands
Publisher	STW
Pages	488-493
Number of pages	6
ISBN (Print)	90-73461-44-8
Publication status	Published - 2006
Event	9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands - Utrecht Duration: 23 Nov 2006 → 24 Nov 2006

Publication series

Name
Publisher	STW

Conference

Conference	9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands
Period	23/11/06 → 24/11/06

Keywords

conference contrib. refereed
Vakpubl., Overig wet. > 3 pag

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{90207c97bc12439f93b2fb6549672399,

title = "Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "MA Wank and I Martin and MA Blauw and {van Swaaij}, RACMM and {van de Sanden}, MCM",

year = "2006",

language = "Undefined/Unknown",

isbn = "90-73461-44-8",

publisher = "STW",

pages = "488--493",

editor = "s.n.",

booktitle = "Proceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",

note = "9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands ; Conference date: 23-11-2006 Through 24-11-2006",

}

Wank, MA, Martin, I, Blauw, MA, van Swaaij, RACMM & van de Sanden, MCM 2006, Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias. in s.n. (ed.), Proceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. STW, Veldhoven, The Netherlands, pp. 488-493, 9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands, 23/11/06.

Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias. / Wank, MA; Martin, I; Blauw, MA et al.
Proceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. ed. / s.n. Veldhoven, The Netherlands: STW, 2006. p. 488-493.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Control of the ion-distribution and measurement of ion currents with a non-sinusoidal substrate bias

AU - Wank, MA

AU - Martin, I

AU - Blauw, MA

AU - van Swaaij, RACMM

AU - van de Sanden, MCM

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-44-8

SP - 488

EP - 493

BT - Proceedings of the 9th STW Annual Workshop on Semiconductor Advances for Future Electronics and Sensors

A2 - s.n., null

PB - STW

CY - Veldhoven, The Netherlands

T2 - 9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands

Y2 - 23 November 2006 through 24 November 2006

ER -