Control-relevant identification and robust motion control of a wafer stage

RA de Callafon, PMJ van den Hof

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Iterative Identification and Control
Editors	P. Albertos and A. Sala
Place of Publication	London
Publisher	Springer
Pages	243-270
Number of pages	17
Publication status	Published - 2002

ISSN 1-85233-509-2

Keywords

@inbook{6f654d7eeed24ef1a6520d12eff3f3bd,

title = "Control-relevant identification and robust motion control of a wafer stage",

keywords = "Boekdeel internat.wet",

author = "{de Callafon}, RA and {van den Hof}, PMJ",

note = "ISSN 1-85233-509-2",

year = "2002",

language = "Undefined/Unknown",

pages = "243--270",

editor = "{P. Albertos and A. Sala}",

booktitle = "Iterative Identification and Control",

publisher = "Springer",

}