Control-relevant identification and robust motion control of a wafer stage

RA de Callafon, PMJ van den Hof

    Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationIterative Identification and Control
    Editors P. Albertos and A. Sala
    Place of PublicationLondon
    PublisherSpringer
    Pages243-270
    Number of pages17
    Publication statusPublished - 2002

    Keywords

    • Boekdeel internat.wet

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