Controller strategies for an ultra-high precision stage.

CS Teo, ST Smith, RH Yang, RJ Hocken, ES Buice

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationConference Proceedings, Volume 1, Euspen, San Sebastian, Spain
EditorsH van Brussel, E. Brinksmeier
Place of PublicationBedford, UK
PublisherEUSPEN
Pages220-227
Number of pages8
ISBN (Print)978-0-9553082-6-0
Publication statusPublished - 2009
Event9th international conference of the european society for precision engineering and nanotechnology - Bedord, UK, San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009

Publication series

Name
PublishereuSPEN
Name
Volume1

Conference

Conference9th international conference of the european society for precision engineering and nanotechnology
CountrySpain
CitySan Sebastian
Period2/06/095/06/09

Keywords

  • Conf.proc. > 3 pag

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