Controller strategies for an ultra-high precision stage.

CS Teo; ST Smith; RH Yang; RJ Hocken; ES Buice

Controller strategies for an ultra-high precision stage.

CS Teo, ST Smith, RH Yang, RJ Hocken, ES Buice

Mechatronic Systems Design

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Conference Proceedings, Volume 1, Euspen, San Sebastian, Spain
Editors	H van Brussel, E. Brinksmeier
Place of Publication	Bedford, UK
Publisher	EUSPEN
Pages	220-227
Number of pages	8
ISBN (Print)	978-0-9553082-6-0
Publication status	Published - 2009
Event	9th international conference of the european society for precision engineering and nanotechnology - Bedord, UK, San Sebastian, Spain Duration: 2 Jun 2009 → 5 Jun 2009

Publication series

Name
Publisher	euSPEN

Name
Volume	1

Conference

Conference	9th international conference of the european society for precision engineering and nanotechnology
Country/Territory	Spain
City	San Sebastian
Period	2/06/09 → 5/06/09

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{77ceaa8df1e84d21ba6a3e3c1174b0f8,

title = "Controller strategies for an ultra-high precision stage.",

keywords = "Conf.proc. > 3 pag",

author = "CS Teo and ST Smith and RH Yang and RJ Hocken and ES Buice",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-0-9553082-6-0",

publisher = "EUSPEN",

pages = "220--227",

editor = "{van Brussel}, H and E. Brinksmeier",

booktitle = "Conference Proceedings, Volume 1, Euspen, San Sebastian, Spain",

note = "9th international conference of the european society for precision engineering and nanotechnology ; Conference date: 02-06-2009 Through 05-06-2009",

}

Teo, CS, Smith, ST, Yang, RH, Hocken, RJ & Buice, ES 2009, Controller strategies for an ultra-high precision stage. in H van Brussel & E Brinksmeier (eds), Conference Proceedings, Volume 1, Euspen, San Sebastian, Spain. EUSPEN, Bedford, UK, pp. 220-227, 9th international conference of the european society for precision engineering and nanotechnology, San Sebastian, Spain, 2/06/09.

TY - GEN

T1 - Controller strategies for an ultra-high precision stage.

AU - Teo, CS

AU - Smith, ST

AU - Yang, RH

AU - Hocken, RJ

AU - Buice, ES

PY - 2009

Y1 - 2009

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-0-9553082-6-0

SP - 220

EP - 227

BT - Conference Proceedings, Volume 1, Euspen, San Sebastian, Spain

A2 - van Brussel, H

A2 - Brinksmeier, E.

PB - EUSPEN

CY - Bedford, UK

T2 - 9th international conference of the european society for precision engineering and nanotechnology

Y2 - 2 June 2009 through 5 June 2009

ER -