Controlling dielectric and optical properties of ordered mesoporous organosilicate films

A. Ruud Balkenende; Femke K. De Theije; J. C.Koen Kriege

doi:10.1002/adma.200390028

Controlling dielectric and optical properties of ordered mesoporous organosilicate films

A. Ruud Balkenende^*, Femke K. De Theije, J. C.Koen Kriege

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

71 Citations (Scopus)

Abstract

The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.

Original language	English
Pages (from-to)	139-143
Number of pages	5
Journal	Advanced Materials
Volume	15
Issue number	2
DOIs	https://doi.org/10.1002/adma.200390028
Publication status	Published - 16 Jan 2003
Externally published	Yes

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title = "Controlling dielectric and optical properties of ordered mesoporous organosilicate films",

abstract = "The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.",

author = "Balkenende, {A. Ruud} and {De Theije}, {Femke K.} and Kriege, {J. C.Koen}",

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AU - Balkenende, A. Ruud

AU - De Theije, Femke K.

AU - Kriege, J. C.Koen

PY - 2003/1/16

Y1 - 2003/1/16

N2 - The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.

AB - The control of dielectric and optical properties of ordered mesoporous organosilicate films was discussed. The composition of the annealed organosilicate films was uniform over the layer thickness according to Rutherford Backscattering (RBS) depth profiling. The analysis showed that the dielectric properties of the layers strongly depended on the degree of hydrophobicity.

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U2 - 10.1002/adma.200390028

DO - 10.1002/adma.200390028

M3 - Article

AN - SCOPUS:0037448729

SN - 0935-9648

VL - 15

SP - 139

EP - 143

JO - Advanced Materials

JF - Advanced Materials

IS - 2

ER -

Controlling dielectric and optical properties of ordered mesoporous organosilicate films

Abstract

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