Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces

TSY Moh, G Pandraud, LCPM de Smet, C. van Rijn, EJR Sudholter, PM Sarro

Research output: Contribution to conferencePosterProfessional

Original languageEnglish
Publication statusPublished - 2011
EventInternational Conference on Materials for Advanced Technologies (ICMAT) 2011 - Suntec City, Singapore
Duration: 26 Jun 20111 Jul 2011

Conference

ConferenceInternational Conference on Materials for Advanced Technologies (ICMAT) 2011
Period26/06/111/07/11

Keywords

  • Geen BTA classificatie

Cite this

Moh, TSY., Pandraud, G., de Smet, LCPM., van Rijn, C., Sudholter, EJR., & Sarro, PM. (2011). Conventional micro-fabrication process for silicon nanowires FET with three {100} surfaces. Poster session presented at International Conference on Materials for Advanced Technologies (ICMAT) 2011, .