Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage

BG Dijkstra, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	41st IEEE conference on decision and control
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	2494-2499
Number of pages	6
ISBN (Print)	0-7803-7516-5
Publication status	Published - 2002
Event	41st IEEE conference on decision and control - Piscataway, NJ, USA, Las Vegas, United States Duration: 10 Dec 2002 → 13 Dec 2002

Name
Publisher	IEEE

Conference	41st IEEE conference on decision and control
Country/Territory	United States
City	Las Vegas
Period	10/12/02 → 13/12/02

Papernr.: ThA04-4

Keywords

@inproceedings{164f4574de5d4c15b7c39a50886ee069,

title = "Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage",

keywords = "Conf.proc. > 3 pag",

author = "BG Dijkstra and OH Bosgra",

note = "Papernr.: ThA04-4; 41st IEEE conference on decision and control ; Conference date: 10-12-2002 Through 13-12-2002",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-7803-7516-5",

publisher = "IEEE Society",

pages = "2494--2499",

booktitle = "41st IEEE conference on decision and control",

}

TY - GEN

T1 - Convergence design considerations of low order Q-ILC for closed loop systems, implemented on a high precision wafer stage

AU - Dijkstra, BG

AU - Bosgra, OH

N1 - Papernr.: ThA04-4

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7516-5

SP - 2494

EP - 2499

BT - 41st IEEE conference on decision and control

PB - IEEE Society

CY - Piscataway

T2 - 41st IEEE conference on decision and control

Y2 - 10 December 2002 through 13 December 2002

ER -