Copper electroplating for integrated RF-devices

E Boellaard; JN Burghartz; CIM Beenakker

Copper electroplating for integrated RF-devices

E Boellaard, JN Burghartz, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]
Editors	JP Veen
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	733-738
Number of pages	6
ISBN (Print)	90-73461-18-9
Publication status	Published - 1999
Event	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo - Utrecht Duration: 24 Nov 1999 → 25 Nov 1999

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo
Period	24/11/99 → 25/11/99

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{29fd73c2cb83469fa49982b6e7234d3e,

title = "Copper electroplating for integrated RF-devices",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "E Boellaard and JN Burghartz and CIM Beenakker",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-73461-18-9",

publisher = "STW Technology Foundation",

pages = "733--738",

editor = "{JP Veen}",

booktitle = "SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]",

note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",

}

Boellaard, E, Burghartz, JN & Beenakker, CIM 1999, Copper electroplating for integrated RF-devices. in JP Veen (ed.), SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]. STW Technology Foundation, Utrecht, pp. 733-738, 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo, 24/11/99.

TY - GEN

T1 - Copper electroplating for integrated RF-devices

AU - Boellaard, E

AU - Burghartz, JN

AU - Beenakker, CIM

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-18-9

SP - 733

EP - 738

BT - SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]

A2 - JP Veen, null

PB - STW Technology Foundation

CY - Utrecht

T2 - 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo

Y2 - 24 November 1999 through 25 November 1999

ER -