Corner rounding-powerful tool for uniform photoresist coating

VG Kutchoukov, M Bao, M Shikida, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationElectronics ET'2001: proceedings of the conference book 1
Place of PublicationSofia
PublisherTechnical University Sofia
Pages73-80
Number of pages8
ISBN (Print)954-9518-15-9
Publication statusPublished - 2001
EventTenth international scientifc and applid science conference electronics ET'2001, Sofia - Sofia
Duration: 26 Sep 200228 Sep 2002

Publication series

Name
PublisherTechnical University Sofia
Name
Volume1

Conference

ConferenceTenth international scientifc and applid science conference electronics ET'2001, Sofia
Period26/09/0228/09/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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