Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

Roberto Pezone; Sebastian Anzinger; Gabriele Baglioni; Hutomo Suryo Wasisto; Pasqualina M. Sarro; Peter G. Steeneken; Sten Vollebregt

doi:10.1038/s41378-024-00705-5

Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

Roberto Pezone^*, Sebastian Anzinger, Gabriele Baglioni, Hutomo Suryo Wasisto, Pasqualina M. Sarro, Peter G. Steeneken, Sten Vollebregt^*

^*Corresponding author for this work

Research output: Contribution to journal › Comment/Letter to the editor › Scientific › peer-review

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Abstract

Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article¹, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f₀₁ > 20 kHz) at 1 × 10³ mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10⁻³ mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f₀₁ > 20 kHz) at 1 × 10⁻³ mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 10³ mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10⁻³ mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10⁻³ mbar”.

Original language	English
Article number	73
Number of pages	1
Journal	Microsystems and Nanoengineering
Volume	10
Issue number	1
DOIs	https://doi.org/10.1038/s41378-024-00705-5
Publication status	Published - 2024

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Pezone, R., Anzinger, S., Baglioni, G., Wasisto, H. S., Sarro, P. M., Steeneken, P. G., & Vollebregt, S. (2024). Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x). Microsystems and Nanoengineering, 10(1), Article 73. https://doi.org/10.1038/s41378-024-00705-5

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title = "Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)",

abstract = "Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 103 mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 10−3 mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 103 mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10−3 mbar”.",

author = "Roberto Pezone and Sebastian Anzinger and Gabriele Baglioni and Wasisto, {Hutomo Suryo} and Sarro, {Pasqualina M.} and Steeneken, {Peter G.} and Sten Vollebregt",

year = "2024",

doi = "10.1038/s41378-024-00705-5",

language = "English",

volume = "10",

journal = "Microsystems and Nanoengineering",

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publisher = "Nature",

number = "1",

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Pezone, R, Anzinger, S, Baglioni, G, Wasisto, HS, Sarro, PM , Steeneken, PG & Vollebregt, S 2024, 'Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)', Microsystems and Nanoengineering, vol. 10, no. 1, 73. https://doi.org/10.1038/s41378-024-00705-5

Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x). / Pezone, Roberto; Anzinger, Sebastian; Baglioni, Gabriele et al.
In: Microsystems and Nanoengineering, Vol. 10, No. 1, 73, 2024.

Research output: Contribution to journal › Comment/Letter to the editor › Scientific › peer-review

TY - JOUR

T1 - Correction to

T2 - Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

AU - Pezone, Roberto

AU - Anzinger, Sebastian

AU - Baglioni, Gabriele

AU - Wasisto, Hutomo Suryo

AU - Sarro, Pasqualina M.

AU - Steeneken, Peter G.

AU - Vollebregt, Sten

PY - 2024

Y1 - 2024

N2 - Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 103 mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 10−3 mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 103 mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10−3 mbar”.

AB - Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 103 mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 10−3 mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 103 mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10−3 mbar”.

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U2 - 10.1038/s41378-024-00705-5

DO - 10.1038/s41378-024-00705-5

M3 - Comment/Letter to the editor

AN - SCOPUS:85195039128

SN - 2096-1030

VL - 10

JO - Microsystems and Nanoengineering

JF - Microsystems and Nanoengineering

IS - 1

M1 - 73

ER -

Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

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