Correction to: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

Roberto Pezone*, Sebastian Anzinger, Gabriele Baglioni, Hutomo Suryo Wasisto, Pasqualina M. Sarro, Peter G. Steeneken, Sten Vollebregt*

*Corresponding author for this work

Research output: Contribution to journalComment/Letter to the editorScientificpeer-review

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Abstract

Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 103 mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 10−3 mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 103 mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10−3 mbar”.

Original languageEnglish
Article number73
Number of pages1
JournalMicrosystems and Nanoengineering
Volume10
Issue number1
DOIs
Publication statusPublished - 2024

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