Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers

J van den Brand, WG Sloof, HA Terryn, JHW de Wit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	81-88
Number of pages	8
Journal	Surface and Interface Analysis
Volume	36
Publication status	Published - 2004

Keywords

@article{97da6d832b9942b08d756417988769a7,

title = "Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers",

keywords = "professional journal papers, ZX CWTS JFIS < 1.00",

author = "{van den Brand}, J and WG Sloof and HA Terryn and {de Wit}, JHW",

year = "2004",

language = "Undefined/Unknown",

volume = "36",

pages = "81--88",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley & Sons",

}

TY - JOUR

T1 - Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers

AU - van den Brand, J

AU - Sloof, WG

AU - Terryn, HA

AU - de Wit, JHW

PY - 2004

Y1 - 2004

KW - professional journal papers

KW - ZX CWTS JFIS < 1.00

M3 - Article

VL - 36

SP - 81

EP - 88

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

ER -