Correlation between hydroxyl fraction and O/Al atomic ratio as determined from XPS spectra of aluminum oxide layers

J van den Brand, WG Sloof, HA Terryn, JHW de Wit

    Research output: Contribution to journalArticleScientificpeer-review

    106 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)81-88
    Number of pages8
    JournalSurface and Interface Analysis
    Volume36
    Publication statusPublished - 2004

    Keywords

    • professional journal papers
    • ZX CWTS JFIS < 1.00

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