@inproceedings{eb023fc7266d414ca8a1947014d7619a,
title = "Crystallographic silicon-etching for ultra-high aspect-ratio FinFET",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "V Jovanovi¿ and T Suligoj and LK Nanver",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-56677-626-4",
publisher = "ECS",
pages = "313--320",
editor = "PJ Timans and EP Gusev and H Iwai and DL Kwong and MC Ozturk and F Roozeboom",
booktitle = "213th Electrochemical Society Meeting",
note = "ECS meeting 2008, Phoenix, AZ, USA ; Conference date: 18-05-2008 Through 22-05-2008",
}