Crystallographic silicon-etching for ultra-high aspect-ratio FinFET

V Jovanovi¿, T Suligoj, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication213th Electrochemical Society Meeting
EditorsPJ Timans, EP Gusev, H Iwai, DL Kwong, MC Ozturk, F Roozeboom
Place of Publications.l.
PublisherECS
Pages313-320
Number of pages8
ISBN (Print)978-1-56677-626-4
Publication statusPublished - 2008
EventECS meeting 2008, Phoenix, AZ, USA - s.l.
Duration: 18 May 200822 May 2008

Publication series

Name
PublisherECS

Conference

ConferenceECS meeting 2008, Phoenix, AZ, USA
Period18/05/0822/05/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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