Cu gettering in Si cavities observed by Positron Annihilation Doppler Broadening

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings MRS-Fall Meeting
Publisher	Mat.Res. Soc. Symp. Proc. Vol 647
Pages	O6.5.1-O6.5.6
Publication status	Published - 2001

Name
Publisher	Mat.Res. Soc. Symp. Proc. Vol 647

Keywords

@inproceedings{8f8dd08a81774e4b98ee063bdd76fea5,

title = "Cu gettering in Si cavities observed by Positron Annihilation Doppler Broadening",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Schut and {van Veen}, A and SWH Eijt",

year = "2001",

language = "Undefined/Unknown",

publisher = "Mat.Res. Soc. Symp. Proc. Vol 647",

pages = "O6.5.1--O6.5.6",

booktitle = "Proceedings MRS-Fall Meeting",

}