Current dependence of reversible electromigration induced resistance changes in short Al lines and interpretation of irreversible effects

AH Verbruggen, MJC van de Homberg, AJ Kalkman, JR Kraayeveld, AWJ Willemsen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    1 Citation (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationMRS Symposium Proceedings Materials Reliability in Microelectronics VI
    Place of PublicationSan Francisco
    PublisherMaterials Research Society
    Number of pages6
    Publication statusPublished - 1996

    Publication series

    PublisherMaterials Research Society

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