Curvature manipulation of photomasks: Enhancing the imaging performance of immersion lithography equipment

CL Valentin

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Munnig Schmidt, Robert, Supervisor
  • Rixen, Daniel, Advisor
Award date22 May 2013
Print ISBNs978-94-6186-128-3
DOIs
Publication statusPublished - 2013

Keywords

  • Diss. prom. aan TU Delft

Cite this