CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer

C Ortiz; LK Nanver; WD van Noort; TLM Scholtes; JW Slotboom

CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer

C Ortiz, LK Nanver, WD van Noort, TLM Scholtes, JW Slotboom

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

270 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	SAFE 2002 Proceedings of the 5th Semiconductor Advances for Future Electronics Workshop
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	75-80
Number of pages	6
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	SAFE, Veldhoven, NL - Utrecht Duration: 27 Nov 2002 → 28 Nov 2002

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	SAFE, Veldhoven, NL
Period	27/11/02 → 28/11/02

Bibliographical note

CD-ROM

Keywords

Elektrotechniek
Techniek
Conf.proc. > 3 pag

Cite this

@inproceedings{2b6f0c8375414f8d802108dac4805f8d,

title = "CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "C Ortiz and LK Nanver and {van Noort}, WD and TLM Scholtes and JW Slotboom",

note = "CD-ROM; SAFE, Veldhoven, NL ; Conference date: 27-11-2002 Through 28-11-2002",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-73461-33-2",

publisher = "STW Technology Foundation",

pages = "75--80",

booktitle = "SAFE 2002 Proceedings of the 5th Semiconductor Advances for Future Electronics Workshop",

}

CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer. / Ortiz, C; Nanver, LK; van Noort, WD et al.
SAFE 2002 Proceedings of the 5th Semiconductor Advances for Future Electronics Workshop. Utrecht: STW Technology Foundation, 2002. p. 75-80.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - CV-doping profiling of shallow junctions with an abrupt and highly doped arsenic buried epilayer

AU - Ortiz, C

AU - Nanver, LK

AU - van Noort, WD

AU - Scholtes, TLM

AU - Slotboom, JW

N1 - CD-ROM

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-33-2

SP - 75

EP - 80

BT - SAFE 2002 Proceedings of the 5th Semiconductor Advances for Future Electronics Workshop

PB - STW Technology Foundation

CY - Utrecht

T2 - SAFE, Veldhoven, NL

Y2 - 27 November 2002 through 28 November 2002

ER -