Damage after annealing and aging at room temperature of platinized silicon substrates

MP Moret, MAC Devillers, FD Tichelaar, E Aret, PR Hageman, PK Larsen

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{eeeb0fb758564d329845eecaf1af47a0,

title = "Damage after annealing and aging at room temperature of platinized silicon substrates",

keywords = "ZX CWTS JFIS < 1.00",

author = "MP Moret and MAC Devillers and FD Tichelaar and E Aret and PR Hageman and PK Larsen",

year = "2003",

language = "Undefined/Unknown",

volume = "434",

pages = "283--295",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}