Abstract
The emerging high-resolution 3D printing technique called two-photon polymerization (2PP) enables to print devices bottom-up rapidly, contrary to the top-down lithography-based fabrication methods. In this work, various polymer microbeams are 3D printed and their resonant characteristics are analyzed to understand the origin of damping. The 2PP printed polymer resonators have shown less damping than other polymer devices reported earlier, with tensile-stressed clamped-clamped beams reaching a record quality factor of 1819. The resonant energy loss was dominant by bulk friction damping. These results pave the path towards using 3D printed microresonators as mass sensors with improved design and fabrication flexibility.
| Original language | English |
|---|---|
| Article number | 015004 |
| Number of pages | 9 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 34 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2024 |
Funding
Funding Information:The authors would like to thank Pieter van Altena and Ahmed Sharaf for the training and lab brainstorming sessions. They also like to thank the PME lab staff members Gideon Emmaneel and Patrick van Holst for their practical support. This work is part of the research project titled NFP4CryoEM with Project Number 13711, which is (partly) funded by the Netherlands Organisation for Scientific Research (NWO-STW). Tomás Manzaneque acknowledges funding from the European Union’s Horizon 2020 research and innovation programme under the Marie SkłodowskaCurie Grant Agreement No. 707404. The opinions expressed in this document reflect only the authors’ views. The European Commission is not responsible for any use that may be made of the information it contains.
Keywords
- 2PP printing
- 3D printing
- additive manufacturing
- damping
- microresonator
- polymer microbeam
- quality factor