@inproceedings{62c2ced9df7a453291048e1c02cbf6a5,
title = "Damping of electrostatic actuators operated at low air pressure using input shaping",
keywords = "conference contrib. non-refer., Conf.proc. > 3 pag",
author = "L Mol and LA Rocha and RF Wolffenbuttel",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-3-00-025529-8",
publisher = "MME",
pages = "13--16",
editor = "s.n.",
booktitle = "Proceedings of MME 2008",
note = "MME 2008,aachen,germany ; Conference date: 28-09-2008 Through 30-09-2008",
}