Damping of electrostatic actuators operated at low air pressure using input shaping

L Mol, LA Rocha, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of MME 2008
Editors s.n.
Place of Publicationaachen,germany
PublisherMME
Pages13-16
Number of pages4
ISBN (Print)978-3-00-025529-8
Publication statusPublished - 2008
EventMME 2008,aachen,germany - aachen,germany
Duration: 28 Sep 200830 Sep 2008

Publication series

Name
PublisherMME

Conference

ConferenceMME 2008,aachen,germany
Period28/09/0830/09/08

Keywords

  • conference contrib. non-refer.
  • Conf.proc. > 3 pag

Cite this

Mol, L., Rocha, LA., & Wolffenbuttel, RF. (2008). Damping of electrostatic actuators operated at low air pressure using input shaping. In s.n. (Ed.), Proceedings of MME 2008 (pp. 13-16). MME.