Deep anisotropic dry etching of silicon microstructures by high-density plasmas

MA Blauw

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Radelaar, S, Supervisor French, P.J., Advisor van der Drift, E.W.J.M., Advisor
Award date	19 Jan 2004
Place of Publication	Delft
Publisher	s.n.
Print ISBNs	90-901 7644-6
Publication status	Published - 2004

verdeling: 70% NAF / 30% EWI

Keywords

@phdthesis{839a50e429a9490f950a32b3a2ca9da7,

title = "Deep anisotropic dry etching of silicon microstructures by high-density plasmas",

keywords = "Diss. prom. aan TU Delft",

author = "MA Blauw",

note = "verdeling: 70% NAF / 30% EWI",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-901 7644-6",

publisher = "s.n.",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}