Deep anisotropic dry etching of silicon microstructures by high-density plasmas

MA Blauw

Research output: ThesisDissertation (TU Delft)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Radelaar, S, Supervisor
  • French, P.J., Advisor
  • van der Drift, E.W.J.M., Advisor
Award date19 Jan 2004
Place of PublicationDelft
Publisher
Print ISBNs90-901 7644-6
Publication statusPublished - 2004

Keywords

  • Diss. prom. aan TU Delft

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