Deep dry etching process development for photonic crystals in InP-based planar waveguides

RW van der Heijden; MSP Andriesse; CF Carlström; EWJM van der Drift; EJ Geluk; F Karouta; P Nouwens; YS Oei; T de Vries; HWM Salemink

Deep dry etching process development for photonic crystals in InP-based planar waveguides

RW van der Heijden, MSP Andriesse, CF Carlström, EWJM van der Drift, EJ Geluk, F Karouta, P Nouwens, YS Oei, T de Vries, HWM Salemink

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

9 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450
Editors	R de la Rue, P Viktorovitch, M Clivia, S Torres, M Midrio
Publisher	SPIE
Pages	523-532
Number of pages	10
Publication status	Published - 2004

Publication series

Name
Publisher	SPIE

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

van der Heijden, RW., Andriesse, MSP., Carlström, CF., van der Drift, EWJM., Geluk, EJ., Karouta, F., Nouwens, P., Oei, YS., de Vries, T., & Salemink, HWM. (2004). Deep dry etching process development for photonic crystals in InP-based planar waveguides. In R. D. L. Rue, P. Viktorovitch, M. Clivia, S. Torres, & M. Midrio (Eds.), Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450 (pp. 523-532). SPIE.

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title = "Deep dry etching process development for photonic crystals in InP-based planar waveguides",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van der Heijden}, RW and MSP Andriesse and CF Carlstr{\"o}m and {van der Drift}, EWJM and EJ Geluk and F Karouta and P Nouwens and YS Oei and {de Vries}, T and HWM Salemink",

year = "2004",

language = "Undefined/Unknown",

publisher = "SPIE",

pages = "523--532",

editor = "Rue, {R de la} and P Viktorovitch and M Clivia and S Torres and M Midrio",

booktitle = "Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450",

address = "United States",

}

van der Heijden, RW, Andriesse, MSP, Carlström, CF, van der Drift, EWJM, Geluk, EJ, Karouta, F, Nouwens, P, Oei, YS, de Vries, T & Salemink, HWM 2004, Deep dry etching process development for photonic crystals in InP-based planar waveguides. in RDL Rue, P Viktorovitch, M Clivia, S Torres & M Midrio (eds), Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450. SPIE, pp. 523-532.

Deep dry etching process development for photonic crystals in InP-based planar waveguides. / van der Heijden, RW; Andriesse, MSP; Carlström, CF et al.
Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450. ed. / R de la Rue; P Viktorovitch; M Clivia; S Torres; M Midrio. SPIE, 2004. p. 523-532.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Deep dry etching process development for photonic crystals in InP-based planar waveguides

AU - van der Heijden, RW

AU - Andriesse, MSP

AU - Carlström, CF

AU - van der Drift, EWJM

AU - Geluk, EJ

AU - Karouta, F

AU - Nouwens, P

AU - Oei, YS

AU - de Vries, T

AU - Salemink, HWM

PY - 2004

Y1 - 2004

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 523

EP - 532

BT - Photonic Crystal materials and nanostructures- proceedings of SPIE volume 5450

A2 - Rue, R de la

A2 - Viktorovitch, P

A2 - Clivia, M

A2 - Torres, S

A2 - Midrio, M

PB - SPIE

ER -