Deep p+ junctions formed by drive-in from pure boron depositions

P Maleki, TLM Scholtes, M Popadic, F Sarubbi, G Lorito, S Milosavljevic, WB De Boer, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationExtended abstracts 2010 International Workshop on Junction Technology (IWJT)
EditorsLJ Yu, PQ Xin, PR Guo, ZL Bing
Place of PublicationLos Alamitos, CA, USA
PublisherIEEE Society
Pages1-4
Number of pages4
ISBN (Print)978-1-4244-5866-0
DOIs
Publication statusPublished - 2010
Event2010 International Workshop on Junction Technology (IWJT), Shanghai, China - Los Alamitos, CA, USA
Duration: 10 May 201011 May 2010

Publication series

Name
PublisherIEEE

Conference

Conference2010 International Workshop on Junction Technology (IWJT), Shanghai, China
Period10/05/1011/05/10

Keywords

  • Conf.proc. > 3 pag

Cite this