Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy

V Nadazdy; V Rana; R Ishihara; S Lanyi; R Durny; JW Metselaar; CIM Beenakker

Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy

V Nadazdy, V Rana, R Ishihara, S Lanyi, R Durny, JW Metselaar, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006
Editors	HA Atwater, V Chu, S Wagner, K Yamamoto, HW Zan
Place of Publication	San Francisco (CA), USA
Publisher	s.l.
Pages	-
ISBN (Print)	978-1-55899-866
Publication status	Published - 2006
Event	MRS Spring Meeting - San Francisco, USA Duration: 17 Apr 2006 → 21 Apr 2006

Publication series

Name
Publisher	s.l.

Name
Volume	910

Conference

Conference	MRS Spring Meeting
Period	17/04/06 → 21/04/06

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Nadazdy, V., Rana, V., Ishihara, R., Lanyi, S., Durny, R., Metselaar, JW., & Beenakker, CIM. (2006). Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy. In HA. Atwater, V. Chu, S. Wagner, K. Yamamoto, & HW. Zan (Eds.), 2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006 (pp. -). s.l..

Nadazdy, V ; Rana, V ; Ishihara, R et al. / Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy. 2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006. editor / HA Atwater ; V Chu ; S Wagner ; K Yamamoto ; HW Zan. San Francisco (CA), USA : s.l., 2006. pp. -

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title = "Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "V Nadazdy and V Rana and R Ishihara and S Lanyi and R Durny and JW Metselaar and CIM Beenakker",

year = "2006",

language = "Undefined/Unknown",

isbn = "978-1-55899-866",

publisher = "s.l.",

pages = "--",

editor = "HA Atwater and V Chu and S Wagner and K Yamamoto and HW Zan",

booktitle = "2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006",

note = "MRS Spring Meeting ; Conference date: 17-04-2006 Through 21-04-2006",

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Nadazdy, V, Rana, V, Ishihara, R, Lanyi, S, Durny, R, Metselaar, JW & Beenakker, CIM 2006, Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy. in HA Atwater, V Chu, S Wagner, K Yamamoto & HW Zan (eds), 2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006. s.l., San Francisco (CA), USA, pp. -, MRS Spring Meeting, 17/04/06.

Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy. / Nadazdy, V; Rana, V; Ishihara, R et al.
2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006. ed. / HA Atwater; V Chu; S Wagner; K Yamamoto; HW Zan. San Francisco (CA), USA: s.l., 2006. p. -.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy

AU - Nadazdy, V

AU - Rana, V

AU - Ishihara, R

AU - Lanyi, S

AU - Durny, R

AU - Metselaar, JW

AU - Beenakker, CIM

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-55899-866

SP - -

BT - 2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006

A2 - Atwater, HA

A2 - Chu, V

A2 - Wagner, S

A2 - Yamamoto, K

A2 - Zan, HW

PB - s.l.

CY - San Francisco (CA), USA

T2 - MRS Spring Meeting

Y2 - 17 April 2006 through 21 April 2006

ER -

Nadazdy V, Rana V, Ishihara R, Lanyi S, Durny R, Metselaar JW et al. Defect states in excimer-laser crystallized single-grain TFTs studied with isothermal charge deep-level transient spectroscopy. In Atwater HA, Chu V, Wagner S, Yamamoto K, Zan HW, editors, 2006 Spring Meeting Symposium Proceedings, MRS Proceedings Volume 910 Symposium A: Amorphous and Polycrystalline Thin-Film Silicon Science and Technology ¿ 2006. San Francisco (CA), USA: s.l. 2006. p. -