Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]

J Shi, LK Nanver, K Grimm, CCG Visser

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

208 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationCSSP98: proceedings. SAFE98: proceedings [CD-ROM]
Editors JP Veen
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages515-519
Number of pages5
ISBN (Print)90-73461-15-4
Publication statusPublished - 1998
EventProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo - Utrecht
Duration: 24 Nov 199825 Nov 1998

Publication series

Name
PublisherSTW technology foundation

Conference

ConferenceProRISC/IEEE Workshop on on Circuits, Systems and Signal Processing. STW's Workshop on Semiconductor Advances for Future Electronics, Mierlo
Period24/11/9825/11/98

Keywords

  • ZX Int.klas.verslagjaar < 2002

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