Defects and thermal stability of nanothin Cu films on Mo and Ta

V Venugopal

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Thijsse, Barend, Supervisor
    Award date10 Oct 2005
    Place of PublicationDelft
    Publisher
    Print ISBNs90-9019791-5
    Publication statusPublished - 2005

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