Defects created by helium implantation at different temperatures in silicon

ML David, E Oliveiro, A Ratchenkova, NN Gerasimenko, A Declemy, JF Barbot, A van Veen, MF Beaufort

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    Original languageUndefined/Unknown
    Title of host publicationUnknown
    PublisherScitec Public.
    Number of pages6
    Publication statusPublished - 2001

    Publication series

    PublisherScitec Public.


    • ZX Int.klas.verslagjaar < 2002

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