Defects created by helium implantation at different temperatures in silicon

ML David, E Oliveiro, A Ratchenkova, NN Gerasimenko, A Declemy, JF Barbot, A van Veen, MF Beaufort

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Name
Publisher	Scitec Public.

Keywords

@inproceedings{b3f553d4ee8340b1a61d941e3298fdef,

title = "Defects created by helium implantation at different temperatures in silicon",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "ML David and E Oliveiro and A Ratchenkova and NN Gerasimenko and A Declemy and JF Barbot and \{van Veen\}, A and MF Beaufort",

year = "2001",

language = "Undefined/Unknown",

publisher = "Scitec Public.",

pages = "285--290",

booktitle = "Unknown",

}

TY - GEN

T1 - Defects created by helium implantation at different temperatures in silicon

AU - David, ML

AU - Oliveiro, E

AU - Ratchenkova, A

AU - Gerasimenko, NN

AU - Declemy, A

AU - Barbot, JF

AU - van Veen, A

AU - Beaufort, MF

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 285

EP - 290

BT - Unknown

PB - Scitec Public.

ER -