Deflection properties of an electrostatic electron lens with a shifted electrode

AC Zonnevylle, T Verduin, CW Hagen, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	31
Issue number	6
DOIs	https://doi.org/doi: 10.1116/1.4826250
Publication status	Published - 2013

Access to Document

@article{6db46ebea8c0467595eccc3beb4e9c0e,

title = "Deflection properties of an electrostatic electron lens with a shifted electrode",

author = "AC Zonnevylle and T Verduin and CW Hagen and P Kruit",

year = "2013",

doi = "doi: 10.1116/1.4826250",

language = "English",

volume = "31",

pages = "1--8",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Deflection properties of an electrostatic electron lens with a shifted electrode

AU - Zonnevylle, AC

AU - Verduin, T

AU - Hagen, CW

AU - Kruit, P

PY - 2013

Y1 - 2013

U2 - doi: 10.1116/1.4826250

DO - doi: 10.1116/1.4826250

M3 - Article

SN - 1071-1023

VL - 31

SP - 1

EP - 8

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -