Deflection properties of an electrostatic electron lens with a shifted electrode

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1-8
    Number of pages8
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume31
    Issue number6
    DOIs
    Publication statusPublished - 2013

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